Lecture Notes || SNS Courseware

Lecture Notes

UNIT 1:

Intrinsic Characteristics of MEMS

Silicon based MEMS processes

Energy Domains and Transducers

Sensors and Actuators

Introduction to Micro fabrication

New Materials – Review of Electrical and Mechanical concepts in MEMS

Mechanical concepts in MEMS

Flexural beam bending

Torsional deflection

UNIT 2:

Interdigitated Finger capacitor – Comb drive devices –

Micro Grippers – Micro Motors

Thermal Sensing and Actuation

Electrostatic sensors

Parallel plate capacitors

Micromagnetic components –Case studies of MEMS in magnetic actuators

Magnetic Actuators

Actuation using Shape Memory Alloys.

UNIT 3:

Piezoresistive sensors

Piezoresistive sensor materials

Piezoresistive Pressure Sensors

Piezoresistive flow sensor

Piezoresistive Tactile Sensors

Piezoresistive Inertia Sensor

Piezoresistive Acoustic Sensor

Piezoresistive Tactile sensors

Piezoresistive Flow sensor

UNIT 4:

Anisotrophic Wet Etching

Plasma Etching

Deep Reaction Ion Etching (DRIE)

Isotropic Wet Etching

Gas Phase Etchants

Case studies

Basic surface micro machining processes

LIGA Process

UNIT 5:

Polymers in MEMS

Polimide

SU- 8 in MEMs

PDMS

PMMA

Liquid Crystal Polymer

Poeylene

Flurocarbon & Applications

Optical MEMS

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